Investigation into Radiation Effects in a p-Channel MOS Transistor
The influence of γ radiation on surface defect formation at the Si–SiO 2 interface in a p -type-channel metal—oxide-silicon (MOS) transistor in the passive mode is considered. Several surface-defect formation processes are observed. The role of molecular hydrogen in the undergate oxide of the MOS tr...
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Published in: | Semiconductors (Woodbury, N.Y.) Vol. 54; no. 8; pp. 877 - 881 |
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Main Authors: | , , |
Format: | Journal Article |
Language: | English |
Published: |
Moscow
Pleiades Publishing
01-08-2020
Springer Springer Nature B.V |
Subjects: | |
Online Access: | Get full text |
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Summary: | The influence of γ radiation on surface defect formation at the Si–SiO
2
interface in a
p
-type-channel metal—oxide-silicon (MOS) transistor in the passive mode is considered. Several surface-defect formation processes are observed. The role of molecular hydrogen in the undergate oxide of the MOS transistor and “hot” electrons forming in the silicon surface region is shown. |
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ISSN: | 1063-7826 1090-6479 |
DOI: | 10.1134/S1063782620080138 |