Change of fundamental properties of dielectric barrier discharge due to the alumina-based barrier layer composition

• Published in: Vacuum Vol. 174; p. 109180
• Main Authors: Kelar, J., Přibyl, R., Pazderka, M., Kelar Tučeková, Z., Zemánek, M., Černák, M.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01-04-2020
• Subjects: Ceramics tape casting; Coplanar DBD; Ignition voltage; Plasma; Quenching voltage; Specialised barrier layer; Surface roughness; Plasma; Ignition voltage; Quenching voltage; Specialised barrier layer; Surface roughness; Ceramics tape casting; Coplanar DBD
• ISSN: 0042-207X; 1879-2715
• DOI: 10.1016/j.vacuum.2020.109180

Dielectric barrier discharges (DBDs) are widely used in various branches of industry. One of the main characteristics of the DBD is the material of the dielectric barrier–in present days, alumina ceramic is the most frequently used material. Basic plasma parameters are affected by the chemical composition of these dielectric barriers, and also by their surface properties. These surface properties are even more dominant in a coplanar arrangement of the DBD (CDBD). Due to this fact, we studied the effect of adding several types of oxides into a pure alumina ceramic (Al2O3). The aim was to determine the impact of the chemical composition of the dielectric barrier and to see complex changes in respect to the surface morphology of the CDBD barrier layer. In the presented study, we focused mainly on determining ignition voltage and quenching voltage. With the help of atomic force microscopy (AFM) images, the results of these measurements were put into correlation with the surface structure of the DBD barrier.