Nanotribology of anti-friction coatings in MEMS

Nanotribology of anti-friction coatings in MEMS

With 1/3 of a monolayer of water between the SAMs and the substrate, there is little effect on either the shear stress or μ, as shown in Figure 8. This is true for both the hydrocarbon and the fluorocarbon SAMs, and is likely because this small amount of water remains tightly bound to hydroxyl group...

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Bibliographic Details
Published in:JOM (1989) Vol. 57; no. 9; pp. 55 - 61
Main Authors: Chandross, Michael, Lorenz, Christian D., Grest, Gary S., Stevens, Mark J., Webb, Edmund B.
Format: Journal Article
Language:English
Published: New York Springer Nature B.V 01-09-2005
Subjects:
Adhesion
Experiments
Friction
Hydrocarbons
Manufacturing
Microelectromechanical systems
Silicon
Simulation
Studies
Substrates
United States > US
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Summary:With 1/3 of a monolayer of water between the SAMs and the substrate, there is little effect on either the shear stress or μ, as shown in Figure 8. This is true for both the hydrocarbon and the fluorocarbon SAMs, and is likely because this small amount of water remains tightly bound to hydroxyl groups on the substrate and does not interfere with the substrate-SAMs interaction. When the water is increased to a full monolayer, however, the effect is strong.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1047-4838
1543-1851
DOI:10.1007/s11837-005-0117-y