Improving the Performance of 110 GHz Membrane-Based Interconnects on Silicon: Modeling, Measurements, and Uncertainty Analysis

In this paper, we describe the development of broadband low-loss interconnects built-in membrane technology on different silicon substrates. We discuss the design of the test structures, which were fabricated and measured in a frequency range from 0.1 to 110 GHz, and present a detailed uncertainty a...

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Bibliographic Details

Published in:	IEEE transactions on components, packaging, and manufacturing technology (2011) Vol. 3; no. 11; pp. 1938 - 1945
Main Authors:	Arz, Uwe, Rohland, Martina, Buttgenbach, Stephanus
Format:	Journal Article
Language:	English
Published:	Piscataway IEEE 01-11-2013 The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subjects:	Conductors Coplanar waveguide (CPW) Coplanar waveguides Fabrication interconnect membrane technology on-wafer measurement Silicon Substrates Uncertainty
Online Access:	Get full text
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