Improving the Performance of 110 GHz Membrane-Based Interconnects on Silicon: Modeling, Measurements, and Uncertainty Analysis

• Published in: IEEE transactions on components, packaging, and manufacturing technology (2011) Vol. 3; no. 11; pp. 1938 - 1945
• Main Authors: Arz, Uwe, Rohland, Martina, Buttgenbach, Stephanus
• Format: Journal Article
• Language: English
• Published: Piscataway IEEE 01-11-2013; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Conductors; Coplanar waveguide (CPW); Coplanar waveguides; Fabrication; interconnect; membrane technology; on-wafer measurement; Silicon; Substrates; Uncertainty
• ISSN: 2156-3950; 2156-3985
• DOI: 10.1109/TCPMT.2013.2271864

In this paper, we describe the development of broadband low-loss interconnects built-in membrane technology on different silicon substrates. We discuss the design of the test structures, which were fabricated and measured in a frequency range from 0.1 to 110 GHz, and present a detailed uncertainty analysis of the membrane coplanar waveguide (CPW) part. Using high-resistivity silicon as a carrier substrate for the membrane CPW, we obtain excellent agreement between the measurements and calculations of the propagation constant in the entire frequency range. The deviations between the measurements and calculations fall within the bounds predicted by the uncertainty analysis.