Stereo Camera System with Digital Image Correlation Method for Accurate Measurement of Position and Orientation of Positioning Stage

• Published in: International journal of automation technology Vol. 9; no. 4; pp. 436 - 443
• Main Authors: Horikawa, Yusuke, Mizutani, Akio, Noda, Tomoaki, Kikuta, Hisao
• Format: Journal Article
• Language: English
• Published: Tokyo Fuji Technology Press Co. Ltd 05-07-2015
• Subjects: Cameras; Correlation analysis; Digital imaging; Position measurement; Random errors; Triangulation
• ISSN: 1881-7629; 1883-8022
• DOI: 10.20965/ijat.2015.p0436

A stereo camera system with digital image correlation (DIC) was developed for accurate measurement of the position and orientation of a precision positioning stage. Stereo correspondence was carefully calculated by sub-image matching based on the DIC method. Camera parameters for the triangulation were determined from the measurement results of
x
,
y
, and
z
translation of an accurate positioning stage. The measured root mean square random errors were 0.6 μm in the in-plane direction and 1.7 μm in the out-of-plane direction. The proportional errors in the in-plane and out-of-plane directions were 0.2 μm/10 mm and 0.5μm/10 mm, respectively.