Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam source

Highly tetrahedral, diamond-like amorphous hydrogenated carbon prepared from a plasma beam source

A highly tetrahedral, diamond-like form of hydrogenated amorphous carbon (a-C:H) with density of 2.9 g cm−3, sp3 fraction of 0.75, and hardness of 61 GPa, the highest values so far attained from a hydrocarbon source gas, has been deposited from acetylene in a novel plasma beam source. The ion energy...

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Bibliographic Details
Published in:Applied physics letters Vol. 64; no. 21; pp. 2797 - 2799
Main Authors: Weiler, M., Sattel, S., Jung, K., Ehrhardt, H., Veerasamy, V. S., Robertson, J.
Format: Journal Article
Language:English
Published: 23-05-1994
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Summary:A highly tetrahedral, diamond-like form of hydrogenated amorphous carbon (a-C:H) with density of 2.9 g cm−3, sp3 fraction of 0.75, and hardness of 61 GPa, the highest values so far attained from a hydrocarbon source gas, has been deposited from acetylene in a novel plasma beam source. The ion energy for highest sp3 fraction is measured to be about 100 eV per C atom, similar to that for a-C, indicating that the subplantation deposition model of a-C also describes a-C:H.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.111428