Effect of the Plasma Deposition Parameters on the Properties of Ti/TiC Multilayers for Hard Coatings Applications
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Published in: | Acta physica Polonica, A Vol. 121; no. 1; pp. 172 - 174 |
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Main Authors: | , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
01-01-2012
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Online Access: | Get full text |
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ISSN: | 0587-4246 1898-794X |
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DOI: | 10.12693/APhysPolA.121.172 |