Fabrication of collimating grids for an x-ray solar telescope using LIGA methods

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Bibliographic Details
Published in:Microsystem technologies Vol. 3; no. 3; pp. 91 - 96
Main Authors: BRENNEN, R. A, HECHT, M. H, MALEK, C. K, WIBERG, D. V, MANION, S. J, BONIVERT, W. D, HRUBY, J. M, SCHOLZ, M. L, STOWE, T. D, KENNY, T. W, JACKSON, K. H
Format: Conference Proceeding Journal Article
Language:English
Published: Berlin Springer 01-05-1997
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ISSN:0946-7076
1432-1858
DOI:10.1007/s005420050062