Fabrication of collimating grids for an x-ray solar telescope using LIGA methods
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Published in: | Microsystem technologies Vol. 3; no. 3; pp. 91 - 96 |
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Main Authors: | , , , , , , , , , , |
Format: | Conference Proceeding Journal Article |
Language: | English |
Published: |
Berlin
Springer
01-05-1997
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Subjects: | |
Online Access: | Get full text |
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ISSN: | 0946-7076 1432-1858 |
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DOI: | 10.1007/s005420050062 |