Change in the properties of polyimide films under combined proton and oxygen plasma irradiation

The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 10 14 –10 16 cm –2 and an oxygen plasma fluence of ~10 20 cm –2 . The transmission and Raman spectra...

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Bibliographic Details

Published in:	Surface investigation, x-ray, synchrotron and neutron techniques Vol. 10; no. 4; pp. 829 - 833
Main Authors:	Novikov, L. S., Voronina, E. N., Chernik, V. N., Zhilyakov, L. A.
Format:	Journal Article
Language:	English
Published:	Moscow Pleiades Publishing 01-07-2016
Subjects:	Chemistry and Materials Science Materials Science Surfaces and Interfaces Thin Films polymer protons radiation-induced effects polyimide oxygen plasma irradiation
Online Access:	Get full text
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