Change in the properties of polyimide films under combined proton and oxygen plasma irradiation

• Published in: Surface investigation, x-ray, synchrotron and neutron techniques Vol. 10; no. 4; pp. 829 - 833
• Main Authors: Novikov, L. S., Voronina, E. N., Chernik, V. N., Zhilyakov, L. A.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01-07-2016
• Subjects: Chemistry and Materials Science; Materials Science; Surfaces and Interfaces; Thin Films; polymer; protons; radiation-induced effects; polyimide; oxygen plasma; irradiation
• ISSN: 1027-4510; 1819-7094
• DOI: 10.1134/S1027451016040327

The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 10
14
–10
16
cm
–2
and an oxygen plasma fluence of ~10
20
cm
–2
. The transmission and Raman spectra of the films, which are measured at different stages of sample irradiation, are compared. Data on the mass loss of the samples as a result of surface erosion are presented.