Change in the properties of polyimide films under combined proton and oxygen plasma irradiation
The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 10 14 –10 16 cm –2 and an oxygen plasma fluence of ~10 20 cm –2 . The transmission and Raman spectra...
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| Published in: | Surface investigation, x-ray, synchrotron and neutron techniques Vol. 10; no. 4; pp. 829 - 833 |
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| Main Authors: | , , , |
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| Language: | English |
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01-07-2016
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| Abstract | The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 10
14
–10
16
cm
–2
and an oxygen plasma fluence of ~10
20
cm
–2
. The transmission and Raman spectra of the films, which are measured at different stages of sample irradiation, are compared. Data on the mass loss of the samples as a result of surface erosion are presented. |
|---|---|
| AbstractList | The results of experimental investigation of the combined action of 500-keV protons and ~20-eV oxygen plasma on thin polyimide films are presented. The samples are irradiated with a proton fluence of 10
14
–10
16
cm
–2
and an oxygen plasma fluence of ~10
20
cm
–2
. The transmission and Raman spectra of the films, which are measured at different stages of sample irradiation, are compared. Data on the mass loss of the samples as a result of surface erosion are presented. |
| Author | Novikov, L. S. Voronina, E. N. Zhilyakov, L. A. Chernik, V. N. |
| Author_xml | – sequence: 1 givenname: L. S. surname: Novikov fullname: Novikov, L. S. organization: Skobeltsyn Institute of Nuclear Physics, Moscow State University, National Research University “Higher School of Economics” – sequence: 2 givenname: E. N. surname: Voronina fullname: Voronina, E. N. organization: Skobeltsyn Institute of Nuclear Physics, Moscow State University – sequence: 3 givenname: V. N. surname: Chernik fullname: Chernik, V. N. organization: Skobeltsyn Institute of Nuclear Physics, Moscow State University – sequence: 4 givenname: L. A. surname: Zhilyakov fullname: Zhilyakov, L. A. organization: Skobeltsyn Institute of Nuclear Physics, Moscow State University |
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| Cites_doi | 10.1016/0029-554X(80)90440-1 10.1016/j.apsusc.2011.12.037 10.1016/j.radphyschem.2007.08.007 10.1016/S0168-583X(02)00669-9 10.1016/j.nimb.2005.01.117 10.1002/9783527632695 10.1007/978-3-642-30229-9_10 10.1103/PhysRevB.61.14095 10.1016/S0168-583X(02)00753-X |
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| Title | Change in the properties of polyimide films under combined proton and oxygen plasma irradiation |
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