CVD growth of carbon nanotubes on thin-film Ni20Ti35N45 alloy catalyst

The possibility of forming carbon nanotube (CNT) arrays on a Ni–Ti–N catalytic alloy with low nickel content by chemical vapor deposition (CVD) is demonstrated. Adding nitrogen to the Ni–Ti alloy composition favors the formation of TiN compound and segregation of Ni on the surface, where it produces...

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Bibliographic Details
Published in:	Technical physics letters Vol. 41; no. 12; pp. 1177 - 1180
Main Authors:	Gromov, D. G., Pavlov, A. A., Skorik, S. N., Trifonov, A. Yu, Shulyat’ev, A. S.
Format:	Journal Article
Language:	English
Published:	Moscow Pleiades Publishing 01-12-2015
Subjects:	Classical and Continuum Physics Physics Physics and Astronomy Scanning Electron Micro Metal Inclusion Scanning Electron Micro Micrograph Alloy Film Technical Physic Letter
Online Access:	Get full text
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Summary:	The possibility of forming carbon nanotube (CNT) arrays on a Ni–Ti–N catalytic alloy with low nickel content by chemical vapor deposition (CVD) is demonstrated. Adding nitrogen to the Ni–Ti alloy composition favors the formation of TiN compound and segregation of Ni on the surface, where it produces a catalytic effect on the CNT growth. It is found that, using CVD from acetylene gas phase at a substrate temperature of 650°C, a CNT array of 9-µm height can be grown for 2 min.
ISSN:	1063-7850 1090-6533
DOI:	10.1134/S1063785015120226