Studying the Thermodynamic Characteristics of Anodic Alumina

Studying the Thermodynamic Characteristics of Anodic Alumina

We report on the complex scanning electron microscopy, X-ray diffraction, energy-dispersive X-ray spectroscopy, and differential thermal analysis study of the composition, structure, and thermodynamic characteristics of a porous alumina membrane.

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Bibliographic Details
Published in:Russian microelectronics Vol. 47; no. 1; pp. 40 - 49
Main Authors: Vorob’eva, A. I., Shimanovich, D. L., Sycheva, O. A.
Format: Journal Article
Language:English
Published: Moscow Pleiades Publishing 2018
Springer Nature B.V
Subjects:
Aluminum oxide
Electrical Engineering
Electron microscopy
Engineering
Scanning electron microscopy
Thermal analysis
X-rays
Online Access:Get full text
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Description
Summary:We report on the complex scanning electron microscopy, X-ray diffraction, energy-dispersive X-ray spectroscopy, and differential thermal analysis study of the composition, structure, and thermodynamic characteristics of a porous alumina membrane.
ISSN:1063-7397
1608-3415
DOI:10.1134/S1063739718010080