Characterization of CNx films by X-ray emission measurements

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Bibliographic Details
Published in:Thin solid films Vol. 402; no. 1-2; pp. 60 - 64
Main Authors: Kurmaev, E.Z, Moewes, A, Winarski, R.P, Shamin, S.N, Ederer, D.L, Feng, J.Y, Turner, S.S
Format: Journal Article
Language:English
Published: United States 01-01-2002
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Description
Bibliography:AC03-76SF00098
LBNL/ALS-43848
US Department of Energy (US)
ISSN:0040-6090
1879-2731
DOI:10.1016/S0040-6090(01)01686-8