Characterization of CNx films by X-ray emission measurements
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Published in: | Thin solid films Vol. 402; no. 1-2; pp. 60 - 64 |
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Main Authors: | , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
United States
01-01-2002
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Subjects: | |
Online Access: | Get full text |
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Bibliography: | AC03-76SF00098 LBNL/ALS-43848 US Department of Energy (US) |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/S0040-6090(01)01686-8 |