On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays

A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was...

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Bibliographic Details
Published in:IEEE photonics technology letters Vol. 8; no. 7; pp. 918 - 920
Main Authors: Boisset, G.C., Robertson, B., Hsiao, W.S., Taghizadeh, M.R., Simmons, J., Song, K., Matin, M., Thompson, D.A., Plant, D.V.
Format: Journal Article
Language:English
Published: IEEE 01-07-1996
Subjects:
Diffraction
Fresnel reflection
Lenses
Microoptics
Optical arrays
Optical interconnections
Optoelectronic devices
Packaging
Substrates
Throughput
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Summary:A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP's) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.
Bibliography:ObjectType-Article-2
SourceType-Scholarly Journals-1
ObjectType-Feature-1
content type line 23
ISSN:1041-1135
1941-0174
DOI:10.1109/68.502270