Simple and robust resistive dual-axis accelerometer using a liquid metal droplet

• Published in: Micro and nano systems letters Vol. 5; no. 1; p. 1
• Main Authors: Huh, Myoung, Won, Dong-Joon, Kim, Joong Gil, Kim, Joonwon
• Format: Journal Article
• Language: English
• Published: Berlin/Heidelberg Springer Berlin Heidelberg 09-01-2017; Springer Nature B.V
• Subjects: Applied and Technical Physics; Circuits and Systems; Electrical Engineering; Engineering; Letter; Mechanical Engineering; Nanotechnology; Cone shaped channel; Robust; Liquid metal droplet; Accelerometer; Nichrome electrodes; Thermoplastic; Simple
• ISSN: 2213-9621; 2213-9621
• DOI: 10.1186/s40486-016-0038-2

This paper presents a novel dual-axis accelerometer that consists of a liquid metal droplet in a cone-shaped channel and an electrode layer with four Nichrome electrodes. The sensor uses the advantages of the liquid metal droplet (i.e., high surface tension, electrical conductivity, high density, and deformability). The cone-shaped channel imposes a restoring force on the liquid metal droplet. We conducted simulation tests to determine the appropriate design specifications of the cone-shaped channel. Surface modifications to the channel enhanced the nonwetting performance of the liquid metal droplet. The performances of the sensor were analyzed by a tilting test. When the acceleration was applied along the axial direction, the device showed ~6 kΩ/g of sensitivity and negligible crosstalk between the X- and Y-axes. In a diagonal direction test, the device showed ~4 kΩ/g of sensitivity.