Copper surface morphology developed in a magnetron sputtering system
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Published in: | Journal of materials science Vol. 24; no. 7; pp. 2408 - 2414 |
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Main Authors: | , , |
Format: | Journal Article |
Language: | English |
Published: |
Heidelberg
Springer
01-07-1989
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Subjects: | |
Online Access: | Get full text |
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Bibliography: | ObjectType-Article-2 SourceType-Scholarly Journals-1 ObjectType-Feature-1 content type line 23 |
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ISSN: | 0022-2461 1573-4803 |
DOI: | 10.1007/bf01174503 |