Test Structures for Characterising the Silver Chlorination Process During Integrated Ag/AgCl Reference Electrode Fabrication

• Published in: 2019 IEEE 32nd International Conference on Microelectronic Test Structures (ICMTS) pp. 58 - 63
• Main Authors: Dunare, C., Marland, J.R.K., Blair, E.O., Tsiamis, A., Moorel, F., Terry, J.G., Walton, A.J., Smith, S.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 01-03-2019
• Subjects: Current measurement; Electrical resistance measurement; Electrochemical Sensors; Electrodes; Microfabrication; Reference Electrode; Resistance; Sensors; Silver; Test Structures
• ISBN: 9781728114644; 1728114640
• ISSN: 1071-9032; 2158-1029
• DOI: 10.1109/ICMTS.2019.8730966

Robust and repeatable processes are required to fabricate reference electrodes for micro-scale integrated electrochemical sensors. One method for this is to produce a "silver/silver chloride" (Ag/Agel) electrode through chemical chlorination of a thin film silver layer. This paper presents test structures, which can electrically characterise the process to aid process development and in-line control of the chlorination process.