Structure and C-V characteristics of PZ/PZT multilayer thin films (in PZ/PZT series sequences) prepared by sol-gel technique
Lead Zirconate (PbZrO 3 : PZ) and Lead Zirconium Titanate (PZT) multilayered thin films were prepared by sol-gel technique. Sets of films (each layer has a 450Å thickness) made by one PZ after one PZT layer are deposited 3 times successively. These films were annealed just one time after full deposi...
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Published in: | Ferroelectrics Vol. 260; no. 1; pp. 131 - 136 |
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Main Authors: | , , , |
Format: | Journal Article |
Language: | English |
Published: |
Taylor & Francis Group
01-01-2001
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Subjects: | |
Online Access: | Get full text |
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Summary: | Lead Zirconate (PbZrO
3
: PZ) and Lead Zirconium Titanate (PZT) multilayered thin films were prepared by sol-gel technique. Sets of films (each layer has a 450Å thickness) made by one PZ after one PZT layer are deposited 3 times successively. These films were annealed just one time after full deposition. Two another sets of films were prepared with the same sequences but different annealing conditions. The mixed phase of ferro- and anti-ferroelectric phases are existed in films that were annealed at every single deposition.
A flat voltage response will be testified by measuring C-V characteristics for these two different films. |
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ISSN: | 0015-0193 1563-5112 |
DOI: | 10.1080/00150190108016006 |