Formation of ultrafine uniform gold nanoparticles by sputtering and redeposition

Formation of ultrafine uniform gold nanoparticles by sputtering and redeposition

Uniformly distributed Au nanoparticles with controllable size were fabricated by focused ion beam bombardment of thin gold films. In situ scanning electron microscopy and ex situ transmission electron microscopy were used to characterize the nanoparticles. Results show that a dual particle size dist...

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Bibliographic Details
Published in:Applied physics letters Vol. 94; no. 13
Main Authors: Zhou, Xiuli, Wei, Qiangmin, Sun, Kai, Wang, Lumin
Format: Journal Article
Language:English
Published: United States 30-03-2009
Subjects:
ABSORPTION
DEPOSITION
FABRICATION
GOLD
ION BEAMS
ION IMPLANTATION
MATERIALS SCIENCE
MORPHOLOGY
NANOSTRUCTURES
PARTICLE SIZE
SCANNING ELECTRON MICROSCOPY
SPUTTERING
THIN FILMS
TRANSMISSION ELECTRON MICROSCOPY
ULTRAVIOLET SPECTRA
VISIBLE SPECTRA
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Summary:Uniformly distributed Au nanoparticles with controllable size were fabricated by focused ion beam bombardment of thin gold films. In situ scanning electron microscopy and ex situ transmission electron microscopy were used to characterize the nanoparticles. Results show that a dual particle size distribution was generated at low ion fluence, while highly uniform Au particles with diameters around 2 nm formed at high fluence. The balance between sputtering and redeposition is responsible for the formation and size control of the nanoparticles. Optical absorption measurement revealed strong size dependant resonances that are attributed to the surface plasmon resonance of the Au particles.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3111443