Deposition of Ti Zr alloy films using Ti and Zr dual-cathode high-power impulse magnetron co-sputtering

Deposition of Ti Zr alloy films using Ti and Zr dual-cathode high-power impulse magnetron co-sputtering

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Bibliographic Details
Published in:Surface & coatings technology Vol. 476; p. 130214
Main Authors: Kuo, Chin-Chiuan, Lin, Yu-Tse, Liu, Wen-Chung
Format: Journal Article
Language:English
Published: 30-01-2024
Online Access:Get full text
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Description
ISSN:0257-8972
DOI:10.1016/j.surfcoat.2023.130214