Transient energy-release pressure-driven microdevices

• Published in: Journal of microelectromechanical systems Vol. 1; no. 3; pp. 155 - 163
• Main Authors: Muntz, E.P., Shiftlett, G.R., Erwin, D.A., Kunc, J.A.
• Format: Journal Article
• Language: English
• Published: New York, NY IEEE 01-09-1992; Institute of Electrical and Electronics Engineers
• Subjects: Actuators; Aerospace industry; Electromagnetic transients; Electrostatics; Exact sciences and technology; Frequency; Gases; General equipment and techniques; Heat transfer; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Open systems; Physics; Pulse generation; Servo and control equipment; robots; Valves; Pressure fluctuation; Microsensor; Control system; Measurement sensor; Micromachine; Energy transfer; Transitory; Actuator; Micropump
• ISSN: 1057-7157; 1941-0158
• DOI: 10.1109/84.186395

A class of transient pressure-driven micromechanical devices that have several advantages over conventional microelectromechanical actuators is described. Although most micromechanical systems developed to date have been involved with electromagnetic or electrostatic forces, in the future micromechanical systems will also involve fluid mechanics, gas dynamics, and thermodynamics at unusually small scales. Generally, the size scaling laws for fluid flows and heat transfer are well understood; however, at the scale of micromachines (say 1-100 mu m), the details of transient behavior become a dominant consideration. The basic principles of transient pressure-driven actuators and some of the factors that must be considered in such designs are discussed.< >