Ion emission from the plasma formed in the ferroelectric active source

• Published in: Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment Vol. 1062; p. 169223
• Main Authors: Stepanov, A.V., Konusov, F.V., Pavlov, S.K., Tarbokov, V.A., Serebrennikov, M.A.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-05-2024
• Subjects: Active plasma source; Ferroelectric; Ion source; Optical emission spectroscopy; Plasma diagnostic; Active plasma source; Ferroelectric; Optical emission spectroscopy; Ion source; Plasma diagnostic
• ISSN: 0168-9002; 1872-9576
• DOI: 10.1016/j.nima.2024.169223

The experimental studies of active plasma source are presented. The plasma was formed by an incomplete discharge on the surface of ferroelectric BaTiO3 samples. The spectrum of the discharge was received using the optical emission spectroscopy method. The spectrum lines corresponded to the atoms and ions of elements related to the ferroelectric (Ba, Ti, O) and residual gas (N). The intensity of the spectrum lines depended on the discharge current and varied slightly depending on the residual gas in the pressure range of 10−5-10−3 Torr. An increase in the gas pressure results in the slight increase in the electron temperature of excited atoms of the discharge plasma. The ion emission in a plasma source at a negative bias voltage has been studied.