Influence of RF plasma properties on the deposited PACVD CNx layers

Influence of RF plasma properties on the deposited PACVD CNx layers

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Bibliographic Details
Published in:Surface & coatings technology Vol. 97; no. 1-3; pp. 109 - 113
Main Authors: Grüger, H., Selbmann, D., Wolf, E., Leonhardt, A.
Format: Journal Article
Language:English
Published: 01-12-1997
Online Access:Get full text
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Description
ISSN:0257-8972
DOI:10.1016/S0257-8972(97)00411-8