Room Temperature Ethanol Gas Sensor Based on Slits Mesoporous Silicon

• Published in: Journal of electronic materials Vol. 51; no. 8; pp. 4337 - 4347
• Main Authors: Abed, Husam R., Alwan, Alwan M., Zayer, Mehdi Q.
• Format: Journal Article
• Language: English
• Published: New York Springer US 01-08-2022; Springer Nature B.V
• Subjects: Characterization and Evaluation of Materials; Chemistry and Materials Science; Electrodes; Electronics and Microelectronics; Ethanol; Gas sensors; Instrumentation; Low concentrations; Materials Science; Optical and Electronic Materials; Optimization; Original Research Article; Porous silicon; Recovery time; Resonance; Response time; Room temperature; Sensors; Slits; Solid State Physics; gas sensor; Ethanol; mesoporous silicon; response
• ISSN: 0361-5235; 1543-186X
• DOI: 10.1007/s11664-022-09691-8

In order to increase the surface area to be used for a high sensor detection, crystalline silicon was etched by a photoelectrochemical etching process. For the examination of sensor performance, a simple, low-cost, and non-toxic method has been applied. This method depends on measuring the resonance frequency when the gas exposes the sample surface. For the optimization purpose, two different electrode connections have been used to select the best configuration (top-bottom electrode and bottom electrode). The current-frequency characteristics showed that the best method of electrode connection is the bottom electrode. The sensing features based on porous silicon have shown a high detection toward ethanol gas molecules represented by a high maximum current and the shifting of resonance frequency that leads to a measurable sensing. Moreover, other factors, including the response time, recovery time, and sensitivity have also been estimated, and it was found that this sensor has a rapid and high response toward the low concentrations of ethanol gas molecules.
Graphical Abstract