Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

Coatings and microstructures of monolithic TiB2 films and double layer and composite TiCN/TiB2 films from alkoxide solutions by thermal plasma CVD

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Bibliographic Details
Published in:Thin solid films Vol. 516; no. 19; pp. 6616 - 6621
Main Authors: Shimada, S., Takahashi, M., Kiyono, H., Tsujino, J.
Format: Journal Article
Language:English
Published: 01-08-2008
Online Access:Get full text
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Description
ISSN:0040-6090
DOI:10.1016/j.tsf.2007.11.093