Surface morphology of silicon single crystals treated with acid polishing etchants

Surface morphology of silicon single crystals treated with acid polishing etchants

Saved in:
Bibliographic Details
Published in:Russian journal of general chemistry Vol. 77; no. 3; pp. 367 - 370
Main Authors: Usenko, A. E., Yukhnevich, A. V.
Format: Journal Article
Language:English
Published: 01-03-2007
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
ISSN:1070-3632
1608-3350
DOI:10.1134/S1070363207030085