Analysis of laser micromachining in silica glass with an absorbent slurry

• Published in: CIRP annals Vol. 57; no. 1; pp. 217 - 222
• Main Authors: Mitsuishi, M., Sugita, N., Kono, I., Warisawa, S.
• Format: Journal Article Conference Proceeding
• Language: English
• Published: Oxford Elsevier Ltd 2008; Elsevier
• Subjects: Analytical and numerical techniques; Applied fluid mechanics; Applied sciences; Exact sciences and technology; Fluid dynamics; Fluidics; Fundamental areas of phenomenology (including applications); Glass; Heat transfer; Laser beam machining; Mechanical engineering. Machine design; Physics; Precision engineering, watch making; Three-dimensional micromachining; Three-dimensional micromachining; Laser beam machining; Glass; Fluid mechanics; Melting; Ultraviolet laser; Precision engineering; Large pipe; Micromachining; Particle suspension; Silica; Pulsed laser; Nanosecond; Groove; Class; Microstructure; Slurries; Microfluidics; Heat transfer; Fluidics
• ISSN: 0007-8506
• DOI: 10.1016/j.cirp.2008.03.006

The authors have investigated a method for machining a 3D microchannel in silica glass using a UV nanosecond pulsed laser and an absorbent slurry. 3D microstructures in glass materials are required for optical waveguides, microfluidic chips, etc. The depths of the grooves and holes produced in the silica glass were found to be proportional to the number of laser pulses. The material removal process in the proposed method was the melting of the glass by heat transfer from the absorbent particles, which were attached to the surface of the glass, providing for strong laser absorption.