Study of Thin Film Blue-light MicroLEDs by Laser Lift-off and Texture Process

• Published in: IEEE electron device letters Vol. 45; no. 2; p. 1
• Main Authors: Hsu, Yu-Hsuan, Wan, Tsung-Chih, Lo, Yu-Yun, Lin, Xin-Dai, Lin, Yi-Hsin, Zan, Hsiao-Wen, Horng, Ray-Hua
• Format: Journal Article
• Language: English
• Published: New York IEEE 01-02-2024; The Institute of Electrical and Electronics Engineers, Inc. (IEEE)
• Subjects: Emission; Etching; GaN texture; laser lift-off; Light emitting diodes; light extraction; Micro-LED; Power generation; Rough surfaces; Sapphire; Substrates; Surface roughness; Surface treatment; Texturing; Thin films
• ISSN: 0741-3106; 1558-0563
• DOI: 10.1109/LED.2023.3338174

In this study, thin-film blue-light micro-light-emitting diodes (μLEDs) were successfully fabricated by laser lift-off technique, which had an emission region of only 10 μm × 10 μm. Additionally, a texturing treatment was applied to the top undoped GaN surface. The texturing time was optimized to prevent a total reflective effect and further enhance the light extraction efficiency. As a result, the emission output power (@ 30 mA) and EQE max of the μLED textured for 2 minutes exhibited 1.35 times and 1.64 times higher values as compared with those of μLED with a sapphire substrate, respectively.