Laser ablation and LIPSS formation at static and dynamic multi-pulse regime on protective Al2O3/TiAlN coating

• Published in: Optical and quantum electronics Vol. 56; no. 4
• Main Authors: Gaković, B., Zamfirescu, M., Panjan, P., Luculescu, C., Albu, C., Petrović, S.
• Format: Journal Article
• Language: English
• Published: New York Springer US 30-01-2024
• Subjects: Characterization and Evaluation of Materials; Computer Communication Networks; Electrical Engineering; Lasers; Optical Devices; Optics; Photonics; Physics; Physics and Astronomy; Selective laser ablation; Micro-channels production; Protective coatings; Laser-induced periodic surface structure (LIPSS)
• ISSN: 1572-817X; 1572-817X
• DOI: 10.1007/s11082-023-06238-x

The study of ablation and the laser-induced periodic surface structure (LIPSS) creation during the static and dynamic ultrafast laser (UFL) processing of the Al
2
O
3
/TiAlN protective coating is reported. The static irradiation was done with 10 successive pulses while scanning irradiation was performed with sample scanning. The laser ablation was studied by analysis of the surface morphology and elemental composition. The selective ablations manifest as circular craters or lines/micro-channels. The borders are very sharp without debris and hydrodynamic features. LIPSSs were formed at the bottoms of craters and microchannels. The periodicity of the created LIPSSs has shown a trend of increase with the pulse energy. Depending on the applied laser fluence the elemental composition in the centre of the craters confirmed the complete removal of the Al
2
O
3
layer and partial ablation of the second TiAlN. The Al
2
O
3
layer and part of TiAlN were ablated in micro-channels too.