Method for the automated creation of panoramic SPM images

Method for the automated creation of panoramic SPM images

s A method for the creation of scanning patterns obtained by scanning probe microscopy (SPM) has been proposed. The algorithm allows scanning patterns to be formed when the values of the distortions along the z -axis are minimized and the shapes and sizes of the objects remain unchanged. To remove i...

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Bibliographic Details
Published in:Surface investigation, x-ray, synchrotron and neutron techniques Vol. 7; no. 1; pp. 154 - 160
Main Authors: Dogadin, S. E., Leesment, S. I., Karban’, O. V.
Format: Journal Article
Language:English
Published: Dordrecht SP MAIK Nauka/Interperiodica 2013
Subjects:
Chemistry and Materials Science
Materials Science
Surfaces and Interfaces
Thin Films
Neutron Technique
Scanning Pattern
Automate Creation
Surface Investigation
Height Range
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Summary:s A method for the creation of scanning patterns obtained by scanning probe microscopy (SPM) has been proposed. The algorithm allows scanning patterns to be formed when the values of the distortions along the z -axis are minimized and the shapes and sizes of the objects remain unchanged. To remove interline jumps the method of preliminary data filtering is based on a formalized choice of the height range which allows us to increase the automation degree of data processing and the reliability of the data. Model SPM patterns were used for testing.
ISSN:1027-4510
1819-7094
DOI:10.1134/S1027451012060067