Multi-step process control and characterization of scanning probe lithography

Multi-step process control and characterization of scanning probe lithography

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Bibliographic Details
Published in:Applied physics. A, Materials science & processing Vol. 66; no. 7; pp. S729 - S733
Main Authors: Peterson, C.A., Ruskell, T.G., Pyle, J.L., Workman, R.K., Yao, X., Hunt, J.P., Sarid, D., Parks, H.G., Vermeire, B.
Format: Journal Article
Language:English
Published: 01-03-1998
Online Access:Get full text
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Description
ISSN:0947-8396
1432-0630
DOI:10.1007/s003390051231