Novel Pb(Ti, Zr)O 3 (PZT) Crystallization Technique Using Flash Lamp for Ferroelectric RAM (FeRAM) Embedded LSIs and One Transistor Type FeRAM Devices

Novel Pb(Ti, Zr)O 3 (PZT) Crystallization Technique Using Flash Lamp for Ferroelectric RAM (FeRAM) Embedded LSIs and One Transistor Type FeRAM Devices

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics Vol. 41; no. Part 1, No. 4B; pp. 2630 - 2634
Main Authors: Yamakawa, Koji, Imai, Keitaro, Arisumi, Osamu, Arikado, Tsunetoshi, Yoshioka, Masaki, Owada, Tatsushi, Okumura, Katsuya
Format: Journal Article
Language:English
Published: 01-04-2002
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.41.2630