Ultra-low-loss high-aspect-ratio Si_3N_4 waveguides
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Published in: | Optics express Vol. 19; no. 4; p. 3163 |
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Main Authors: | , , , , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
14-02-2011
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Online Access: | Get full text |
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ISSN: | 1094-4087 1094-4087 |
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DOI: | 10.1364/OE.19.003163 |