Low Z substrates for cost effective high-energy, stacked exposures

Low Z substrates for cost effective high-energy, stacked exposures

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration Vol. 4; no. 1; pp. 17 - 20
Main Authors: MANOHARA, H. M, KHAN MALEK, C, DEWA, A. S, DENG, K
Format: Journal Article
Language:English
Published: Berlin Springer 12-12-1997
Subjects:
Applied sciences
Exact sciences and technology
Mechanical engineering. Machine design
Precision engineering, watch making
Wave transmission
Hard X ray
Three dimensional structure
Electroforming
Stacking
Precision engineering
X ray lithography
Numerical simulation
Miniaturization
Experimental study
Substrates
Production process
Online Access:Get full text
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Description
ISSN:0946-7076
1432-1858
DOI:10.1007/s005420050084