Use of thin film of a Co15Ti40N35 alloy for CVD catalytic growth of carbon nanotubes

• Published in: Russian microelectronics Vol. 45; no. 2; pp. 98 - 104
• Main Authors: Gromov, D. G., Dubkov, S. V., Pavlov, A. A., Skorik, S. N., Trifonov, A. Yu, Shulyatev, A. S., Shaman, Yu. P., Rygalin, B. N.
• Format: Journal Article
• Language: English
• Published: Moscow Pleiades Publishing 01-03-2016
• Subjects: Electrical Engineering; Engineering; Carbon Nanotubes; Multiwalled Carbon Nanotubes; RUSSIAN Microelectronics; Catalytic Chemical Vapor Deposition; Alloy Thin Film
• ISSN: 1063-7397; 1608-3415
• DOI: 10.1134/S1063739716020050

It is shown that multiwalled carbon nanotubes can be grown on the catalytic surface of a Co–Ti–N alloy with low (~10 at %) cobalt content by the conventional method of chemical deposition from acetylene. Adding nitrogen to the composition of the Co–Ti contributes the formation of the TiN compound and extrusion of Co onto the surface where it makes a catalytic effect for CNT growth. It was found that the tubes begin growth at a temperature of 400°C. It is shown by studies using Raman spectroscopy that the quality of CNT improves with increasing temperature.