Modeling and measurements of MEMS gyroscopes

• Published in: PLANS 2004. Position Location and Navigation Symposium (IEEE Cat. No.04CH37556) pp. 111 - 119
• Main Authors: Pryputniewicz, R.J., Xiangguang Tan, Przekwas, A.J.
• Format: Conference Proceeding
• Language: English
• Published: Piscataway NJ IEEE 2004
• Subjects: Acoustic wave devices, piezoelectric and piezoresistive devices; Application software; Applied sciences; Circuit properties; Computational modeling; Computer simulation; Costs; Design automation; Electric, optical and optoelectronic circuits; Electronics; Exact sciences and technology; Gyroscopes; Integrated optoelectronics. Optoelectronic circuits; Micro- and nanoelectromechanical devices (mems/nems); Micromechanical devices; Military computing; Optical and optoelectronic circuits; Optoelectronic devices; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices; Software prototyping; Virtual prototyping; State of the art; High resolution; Optoelectronics; Deformation; Prototype; Circuit design; Measurement sensor; Modeling; Military application; Laser microscope; Accuracy; Simulation; Multiscale method; Optoelectronic device; Gyroscope; Product development; Software; Spatial resolution; Computer aided design; Microelectromechanical device; Interferometry; Execution time
• ISBN: 9780780384163; 0780384164
• DOI: 10.1109/PLANS.2004.1308982

Advances in MEMS inertial sensors, such as gyroscopes, require the use of computational modeling and simulation with physical measurements. We believe that successful combination of computer aided design (CAD) and multiphysics simulation tools with the state-of-the-art (SOTA) measurement methodology will contribute to reduction of high prototyping costs, long product development cycles, and time-to-market pressures while developing MEMS gyroscopes for various military and commercial applications. In our approach we combine a unique, fully integrated, software environment for multiscale, multiphysics, high fidelity analyses of MEMS gyroscopes with the SOTA optoelectronic laser interferometric microscope (OELIM) methodology. The OELIM methodology allows remote, noninvasive, full-field-of-view measurements of deformations with high spatial resolution, nanometer accuracy, and in near real-time. In this paper, both, the software environment and the OELIM methodology are described and their applications are illustrated with representative examples demonstrating viability of the hybrid approach, combining modeling and measurements, for the development of MEMS gyroscopes. These preliminary examples demonstrate capability of our approach to quantitatively determine effects of static and dynamic loads on the performance of MEMS gyroscopes.