Plasma electrolytic oxidation of tantalum

This paper is a review of our research on the plasma electrolytic oxidation (PEO) process of tantalum in 12-tungstosilicic acid. For the characterization of microdischarges during PEO, real-time imaging and optical emission spectroscopy (OES) were used. The surface morphology, chemical and phase com...

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Bibliographic Details
Published in:Serbian journal of electrical engineering Vol. 9; no. 1; pp. 81 - 94
Main Authors: Petkovic, Marija, Stojadinovic, Stevan, Vasilic, Rastko, Belca, Ivan, Kasalica, Becko, Zekovic, Ljubisa
Format: Journal Article
Language:English
Published: Faculty of Technical Sciences in Cacak 2012
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Summary:This paper is a review of our research on the plasma electrolytic oxidation (PEO) process of tantalum in 12-tungstosilicic acid. For the characterization of microdischarges during PEO, real-time imaging and optical emission spectroscopy (OES) were used. The surface morphology, chemical and phase composition of oxide coatings were investigated by AFM, SEM-EDS and XRD. Oxide coating morphology is strongly dependent on PEO time. The elemental components of PEO coatings are Ta, O, Si and W. The oxide coatings are partly crystallized and mainly composed of WO3, Ta2O5 and SiO2. nema PR Projekat Ministarstva nauke Republike Srbije, br. 171035
ISSN:1451-4869
2217-7183
DOI:10.2298/SJEE1201081P