Charge compensation using optical conductivity enhancement and simple analytical protocols for SIMS of resistive Si1−xGex alloy layers

Charge compensation using optical conductivity enhancement and simple analytical protocols for SIMS of resistive Si1−xGex alloy layers

Saved in:
Bibliographic Details
Published in:Applied surface science Vol. 203-204; pp. 500 - 503
Main Authors: Dowsett, M.G., Morris, R., Chou, Pei-Fen, Corcoran, S.F., Kheyrandish, H., Cooke, G.A., Maul, J.L., Patel, S.B.
Format: Journal Article
Language:English
Published: 15-01-2003
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
ISSN:0169-4332
DOI:10.1016/S0169-4332(02)00765-1