Gas-Jet Synthesis of Diamond Coatings from a H2+CH4+Ar Mixture Activated in a Microwave Discharge

Gas-Jet Synthesis of Diamond Coatings from a H2+CH4+Ar Mixture Activated in a Microwave Discharge

In this study, a gas-jet diamond synthesis method using a high-speed jet for the transportation of gases activated in microwave plasma of gases to a substrate was developed. Diamond was synthesized in a hydrogen–methane–argon mixture. The diamond synthesis rate (130 µm/h) exceeded the rate attained...

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Bibliographic Details
Published in:Doklady. a journal of the Russian Academy of Sciences. Physics Vol. 67; no. 7; pp. 197 - 200
Main Authors: Rebrov, A. K., Emel’yanov, A. A., Pinaev, V. A., Plotnikov, M. Yu, Timoshenko, N. I., Yudin, I. B.
Format: Journal Article
Language:English
Published: Moscow Pleiades Publishing 01-07-2022
Springer Nature B.V
Subjects:
Argon
Classical Mechanics
Diamond films
Gas jets
Mathematical and Computational Physics
Methane
Microwave discharge
Microwave plasmas
Mixtures
Physics
Physics and Astronomy
Substrates
Synthesis
Theoretical
diamond
gas-jet deposition
gas-phase synthesis
microwave plasma
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Summary:In this study, a gas-jet diamond synthesis method using a high-speed jet for the transportation of gases activated in microwave plasma of gases to a substrate was developed. Diamond was synthesized in a hydrogen–methane–argon mixture. The diamond synthesis rate (130 µm/h) exceeded the rate attained in earlier gas-jet experiments with activation in microwave plasma without argon additions.
ISSN:1028-3358
1562-6903
DOI:10.1134/S1028335822070047