Super-SIMS at DREAMS: Status of a unique and complex endeavour
At the DREAMS (DREsden AMS) facility we are implementing a so-called Super-SIMS (SIMS = Secondary Ion Mass Spectrometry) device, which combines the micron-scale spatial resolution of a commercial SIMS (CAMECA IMS 7f-auto) with the very high selectivity through molecule suppression by AMS. We have de...
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Published in: | Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 532; pp. 52 - 57 |
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Main Authors: | , , , , , , , , |
Format: | Journal Article |
Language: | English |
Published: |
Elsevier B.V
01-12-2022
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Subjects: | |
Online Access: | Get full text |
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Summary: | At the DREAMS (DREsden AMS) facility we are implementing a so-called Super-SIMS (SIMS = Secondary Ion Mass Spectrometry) device, which combines the micron-scale spatial resolution of a commercial SIMS (CAMECA IMS 7f-auto) with the very high selectivity through molecule suppression by AMS. We have demonstrated high transmission for major element ions including silicon, fluorine and iodine, however the lack of well characterized calibration materials makes a true quantification of trace and ultra-trace elements contents difficult. Measurements of P in Si show the linearity of the instrument’s relative sensitivity factor over more than three orders of magnitude, and measurements of the isotopic ratio of bromine in ZnS document the reliability of our approach. The goal of the DREAMS Super-SIMS project is to provide quantitative concentration data of ultra-trace elements in geological samples in the context of resource technology. |
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ISSN: | 0168-583X 1872-9584 |
DOI: | 10.1016/j.nimb.2022.09.023 |