Microfabricated gas phase chemical analysis systems

A portable, autonomous, hand-held chemical laboratory (/spl mu/ChemLab/sup TM/) is being developed for trace detection (ppb) of chemical warfare (CW) agents and explosives in real-world environments containing high concentrations of interfering compounds. Microfabrication is utilized to provide mini...

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Bibliographic Details

Published in:	Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference pp. 60 - 61
Main Authors:	Frye-Mason, G.C., Manginell, R.P., Heller, E.J., Matzke, C.M., Casalnuovo, S.A., Hietala, V.M., Kottenstette, R.J., Lewis, P.R., Wong, C.C.
Format:	Conference Proceeding
Language:	English
Published:	IEEE 1999
Subjects:	Acoustic signal detection Acoustic waves Chemical analysis Chemical compounds Detectors Explosives Fabrication Particle separators Surface acoustic waves System performance
Online Access:	Get full text
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