Microfabricated gas phase chemical analysis systems

• Published in: Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference pp. 60 - 61
• Main Authors: Frye-Mason, G.C., Manginell, R.P., Heller, E.J., Matzke, C.M., Casalnuovo, S.A., Hietala, V.M., Kottenstette, R.J., Lewis, P.R., Wong, C.C.
• Format: Conference Proceeding
• Language: English
• Published: IEEE 1999
• Subjects: Acoustic signal detection; Acoustic waves; Chemical analysis; Chemical compounds; Detectors; Explosives; Fabrication; Particle separators; Surface acoustic waves; System performance
• ISBN: 4930813972; 9784930813978
• DOI: 10.1109/IMNC.1999.797476

A portable, autonomous, hand-held chemical laboratory (/spl mu/ChemLab/sup TM/) is being developed for trace detection (ppb) of chemical warfare (CW) agents and explosives in real-world environments containing high concentrations of interfering compounds. Microfabrication is utilized to provide miniature, low-power components that are characterized by rapid, sensitive and selective response. Sensitivity and selectivity are enhanced using two parallel analysis channels, each containing the sequential connection of a front-end sample collector/concentrator, a gas chromatographic (GC) separator, and a surface acoustic wave (SAW) detector. Component design and fabrication and system performance are described.