Improved Dynamic R ON of GaN Vertical Trench MOSFETs (OG-FETs) Using TMAH Wet Etch

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Bibliographic Details
Published in:	IEEE electron device letters Vol. 39; no. 7; pp. 1030 - 1033
Main Authors:	Ji, Dong, Li, Wenwen, Agarwal, Anchal, Chan, Silvia H., Haller, Jeffrey, Bisi, Davide, Labrecque, Michelle, Gupta, Chirag, Cruse, Bill, Lal, Rakesh, Keller, Stacia, Mishra, Umesh K., Chowdhury, Srabanti
Format:	Journal Article
Language:	English
Published:	01-07-2018
Online Access:	Get full text
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ISSN:	0741-3106 1558-0563
DOI:	10.1109/LED.2018.2843335