Growth of ferroelectric PbZr Ti1−O3 thin films by metalorganic chemical vapor deposition (MOCVD)
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Published in: | Journal of crystal growth Vol. 237-239; pp. 448 - 454 |
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Main Authors: | , , , |
Format: | Journal Article |
Language: | English Japanese |
Published: |
01-04-2002
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Online Access: | Get full text |
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ISSN: | 0022-0248 |
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DOI: | 10.1016/S0022-0248(01)01968-6 |