X-ray microbeam probing of elastic strains in patterned He+ implanted single-crystal LiNbO3

X-ray microbeam probing of elastic strains in patterned He+ implanted single-crystal LiNbO3

X-ray microprobing is used to investigate buried elastic strain resulting from deep He+ implantantion in LiNbO3. The implantation regions are defined lithographically and strain fields mapped with spatial- and energy-resolved x-ray microdiffraction to characterize the resulting structures. The struc...

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Bibliographic Details
Published in:Applied physics letters Vol. 91; no. 11
Main Authors: Djukic, Djordje, Roth, Ryan M., Osgood, R. M., Evans-Lutterodt, Kenneth, Bakhru, Hassaram, Bakhru, Sasha, Welch, David
Format: Journal Article
Language:English
Published: 10-09-2007
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Summary:X-ray microprobing is used to investigate buried elastic strain resulting from deep He+ implantantion in LiNbO3. The implantation regions are defined lithographically and strain fields mapped with spatial- and energy-resolved x-ray microdiffraction to characterize the resulting structures. The structurally modified regions are found to retain their lateral lithographic definition, with the buried implantation being in strong compression.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2776859