Depth resolution and dynamic range of 18O(p,α) 15N depth profiling

• Published in: Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms Vol. 136; pp. 1306 - 1311
• Main Authors: Liu, J.R., Li, Y.P., Chen, Q.Y., Cui, X.T., Christoffersen, R., Jacobson, A., Chu, W.K.
• Format: Journal Article
• Language: English
• Published: Elsevier B.V 01-03-1998
• Subjects: Ion beam analysis; NRA; Nuclear reaction analysis; Oxide; Nuclear reaction analysis; Oxide; NRA; 80.70.Jb; 82.80.Yc; Ion beam analysis
• ISSN: 0168-583X; 1872-9584
• DOI: 10.1016/S0168-583X(97)00835-5

This paper discusses an approach to get better depth resolution and the 2–3 μm dynamic range needed for diffusion studies of oxygen, using
18O(p,α)
15N nuclear reaction analysis (NRA). This was achieved by optimizing the experimental parameters, and using fast electronics without the absorber in front of the detector. By energy analysis of the α-particles, a depth resolution of 170 to 300 Å was obtained with the dynamic range varying from the surface to a depth of 3 μm. Problems in data analysis, i.e., the cross sections and energy straggling will be discussed. Examples in depth profiling of
18O-implanted SrTiO
3 single crystals and Yttrium stabilized zirconia (YSZ) single crystals annealed in
18O at high temperature are presented.