Correction: Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors

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Bibliographic Details
Published in:	Nanomanufacturing and metrology Vol. 5; no. 4; p. 439
Main Authors:	Matsukuma, Hiraku, Adachi, Keisuke, Sugawara, Takuma, Shimizu, Yuki, Gao, Wei, Niwa, Eiji, Sasaki, Yoshihiro
Format:	Journal Article
Language:	English
Published:	Singapore Springer Nature Singapore 01-12-2022
Subjects:	Correction Engineering Machines Manufacturing Nanotechnology Nanotechnology and Microengineering Processes
Online Access:	Get full text
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