Study on the influence of manufacturing tolerance of the spring beam on the sensitivity of the two-axis MEMS accelerometer

Study on the influence of manufacturing tolerance of the spring beam on the sensitivity of the two-axis MEMS accelerometer

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Bibliographic Details
Published in:International journal on interactive design and manufacturing
Main Authors: Van Cuong, Nguyen, Van Minh, Phung, Cuong, Bui Manh, Duc, Nguyen Dinh
Format: Journal Article
Language:English
Published: 14-07-2024
Online Access:Get full text
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Description
ISSN:1955-2513
1955-2505
DOI:10.1007/s12008-024-02003-w